Russell J. Low
Also at AXCELIS TECHNOLOGIES
About
Russell J. Low, currently 54 years old and holding a Ph.D., has built a strong foundation in the semiconductor industry. He has developed extensive expertise through roles in engineering and management within leading companies in the sector.
He began his tenure at ACLS in October 2016 as Executive Vice President, Engineering. Later, he advanced to serve as Executive Vice President, Global Customer and Engineering Operations in January 2021, before assuming the role of President and Chief Executive Officer on May 11, 2023.
Dr. Low’s career is marked by a commitment to technological excellence and operational leadership. His contributions have supported improvements in financial performance and market share at ACLS, while he also engages in industry initiatives through his roles on the North American Advisory Board of SEMI International and the Massachusetts High Tech Council.