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May Su

Director at ONTO INNOVATIONONTO INNOVATION
Board

About May Su

Independent director of Onto Innovation since March 2022; age 67. Su is a semiconductor capital equipment veteran with 40+ years of operating leadership, including CEO of Kateeva (2020–2022), and senior roles at Brooks Automation, Crossing Automation (acq. by Brooks), Nova Measuring Instruments, Aviza, New-Wave Research, KLA-Tencor, and Lam Research. Education: B.S. Mechanical Engineering (Cornell), M.S. Mechanical Engineering (UC Berkeley), MBA (Santa Clara University, Leavey). She also serves on the board of Applied Engineering, Inc.

Past Roles

OrganizationRoleTenureCommittees/Impact
Kateeva, Inc.Chief Executive OfficerMar 2020 – Oct 2022Led operations in inkjet deposition equipment; board director (2020–2022)
Kateeva, Inc.Chief Marketing Officer; SVP SalesCMO Jan 2018–May 2019; SVP Sales May 2019–Mar 2020Drove commercial strategy and sales execution
Brooks Automation, Inc.VP Strategic Marketing; VP Strategic OEM Sales2012 – 2016Strategic positioning and OEM relationships
Crossing Automation Inc.VP & GM2009 – 2012Fab/tool automation; company acquired by Brooks in 2012
Nova Measuring InstrumentsPresident, U.S. & European Field OperationsPrior to Crossing; years not specifiedMetrology field operations leadership
Aviza Technology; New-Wave Research; KLA-Tencor; Lam ResearchSenior management rolesPrior years, not specifiedVarious senior roles across semiconductor equipment
Independent consultantConsultant2016 – 2018Strategic advisory

External Roles

OrganizationRoleTenure
Applied Engineering, Inc.DirectorCurrent (as disclosed)
Kateeva, Inc.Director2020 – 2022

Board Governance

  • Committee assignments: Compensation Committee (Chair); Nominating & Governance Committee (member) .
  • Independence: Board-determined independent director under NYSE/SEC standards .
  • Attendance: In 2024, each incumbent director attended at least 93% of Board and applicable committee meetings; Board met six times with four executive sessions of independent directors .
  • Committee activity (2024): Audit Committee 10 meetings; Compensation Committee 5; Nominating & Governance 5; M&A 5 .

Fixed Compensation

ElementStandard Policy AmountFrequency/Notes
Annual Board Retainer (cash)$70,000Paid quarterly beginning May 2024 (Mar 1, Jun 1, Sep 1, Dec 1)
Committee Chair Stipend – Compensation$20,000Annual
Committee Member – Nominating & Governance$5,000Annual
Annual Equity Grant (RSUs)$185,000Granted at/near Annual Meeting; shares = $ amount ÷ closing price
Initial Equity Grant (RSUs)$185,000Prorated based on quarters to next annual grant; typical 1-year vest

2024 actual compensation for May Su:

NameFees Earned/Paid in CashStock Awards (grant-date fair value)Total
May Su$71,250 $185,156 $256,406

Notes:

  • 2024 cash reflects three quarterly payments due to schedule change in May 2024; future periods will reflect four payments .

Performance Compensation

Equity ComponentGrant DetailsOutstandingVesting
Annual RSU grant (2024)$185,156 grant-date fair value 809 RSUs outstanding as of 12/28/2024 Director equity awards typically vest on 1st anniversary of grant
Annual RSU grant (2025)2,114 shares awarded 5/21/2025 (Form 4) Post-transaction ownership 7,223 shares (common) Not specified in Form 4; company policy typically 1-year vest

No director options or performance share units are disclosed; director equity is RSU-based with time-based vesting; no non-equity incentive plan compensation or pensions for directors in 2024 .

Other Directorships & Interlocks

CompanyTypeRolePotential Interlock/Notes
Kateeva, Inc.Semiconductor equipmentDirector (2020–2022) Industry adjacency; no related party transactions disclosed by ONTO
Applied Engineering, Inc.High-tech contract manufacturingDirector (current) No related party transactions disclosed by ONTO

Compensation Committee interlocks: None; all Compensation Committee members were independent and had no Item 404 relationships in 2024 .

Expertise & Qualifications

  • 40+ years in semiconductor capital equipment; CEO, GM, sales/marketing, field operations across multiple leading equipment companies .
  • Mechanical engineering degrees (Cornell, UC Berkeley) and MBA (Santa Clara) .
  • International and financial experience highlighted in Board qualifications .

Equity Ownership

HolderShares Beneficially Owned% of ClassDate
May Su5,109 <1% Mar 25, 2025
May Su (post 2025 grant)7,223 common (post-award) <1% (not calculated)May 21, 2025

Stock ownership guidelines for directors: 3× annual cash retainer; compliance reviewed annually; all directors were in compliance as of Feb 2025 . Anti-hedging, anti-short sale, anti-pledging policies apply to directors .

Insider Trades (Form 4)

Source: Insider-trades skill; records reflect Form 4 filings and post-transaction ownership.

Governance Assessment

  • Board effectiveness: Su chairs Compensation and sits on Nominating & Governance, aligning with her operating and human capital expertise. Committee independence and use of an independent compensation consultant (Compensia) support robust pay governance .
  • Independence and engagement: Independent under NYSE/SEC; 2024 attendance ≥93% across Board/committees; regular executive sessions indicate healthy independent oversight .
  • Pay alignment: Director pay mix is cash + RSUs with annual $185k equity and moderate cash retainers/committee fees; no options or performance cash, reinforcing long-term alignment .
  • Ownership alignment: Complies with 3× retainer ownership guideline; anti-hedging/pledging policies in place; ongoing RSU grants increase skin-in-the-game .
  • Conflicts/related parties: Company reports no related person transactions during the period; Compensation Committee interlocks/related party disclosures are clean—no red flags .

RED FLAGS

  • None disclosed: no related party transactions, no hedging/pledging, no attendance issues, and independent committee leadership .

Additional Board/Policy Context

  • Annual say-on-pay held; Board recommends “FOR” each year, reflecting commitment to pay-for-performance principles for executives (useful context for Comp Committee leadership) .
  • Audit Committee pre-approves all audit/non-audit services; two Audit Committee financial experts designated—reinforces financial oversight strength .