Michael P. Plisinski

Chief Executive Officer at ONTO INNOVATION

Since 2019-10-25

Age

54 years

Education

Holds a Bachelor of Science in Computer Science from the University of Massachusetts and completed the Advanced Management Program at Harvard Business School.

Tenure

Has been the Chief Executive Officer of Onto Innovation since the merger date, after serving as CEO of Rudolph Technologies from November 2015.

Also at ONTO INNOVATION

DMB

David Mayson Brooks

VP & GM, Inspection Business Unit

View →

MRS

Mark R. Slicer

Chief Financial Officer

Robert Fiordalice

SVP & GM, Metrology Business Unit

About

Michael P. Plisinski is a seasoned executive with 54 years of life experience and an extensive background in the semiconductor and technology industries. Over his career, he has demonstrated a strong ability to lead and innovate, having held various leadership positions that have shaped his professional journey.

Before assuming his current role at Onto Innovation, he steered Rudolph Technologies as the CEO from November 2015 until a significant merger transitioned the company into Onto Innovation. His prior experiences include roles as Executive Vice President, Chief Operating Officer, and as Vice President and General Manager in key business units, all of which contributed to his deep expertise in strategic management and technological advancement.

Beyond his executive responsibilities, he has also enriched the broader tech community by serving on the boards of multiple organizations, including Cognizer.AI and the Massachusetts High Technology Council, Inc., thereby leveraging his comprehensive industry experience to drive innovation and progress within the technology ecosystem.

$ONTO Performance Under Michael P. Plisinski

Past Roles

Organization	Role	Date Range	Details
Rudolph Technologies, Inc.	Chief Executive Officer	November 2015 to October 2019	Ended with merger
Rudolph Technologies, Inc.	Executive Vice President and Chief Operating Officer	October 2014 to November 2015	N/A
Rudolph Technologies, Inc.	Vice President and General Manager of the Data Analysis and Review Business Unit	February 2006 to October 2014	N/A
August Technology Corporation	Vice President of Engineering	February 2004 to February 2006	N/A
August Technology Corporation	Director of Strategic Marketing for Review and Analysis Products	July 2003 to February 2004	N/A
Counterpoint Solutions	Founder and President	June 1999 to July 2003	Company acquired by August Technology

External Roles

Organization	Role	Date Range	Details
Cognizer.AI	Board Member	since August 2020	Specializes in deep-learning-powered natural language intelligence
Massachusetts High Technology Council, Inc.	Board Member	since May 2022	N/A

Fixed Compensation

Data from FY 2023

Component Name	Amount	Payment Schedule	Additional Details
Base Salary	$700,000	Annual	10% increase from 2022 base salary of $636,892; approved by the Compensation Committee
All Other Compensation	$1,433	Annual	Comprises 401(k) Matching Contribution: $743 and Insurance Premiums: $690 (coverage includes group term life and accidental death/dismemberment; benefit capped at the lesser of 2x salary or $500,000)

Performance Compensation

Data from FY 2023

Annual Cash Incentive Compensation (2023)

Metric	Weight	Threshold / Target / Max	Target / Actual	Payout / Details
Revenue	50%	Threshold: 80% of target; Target: 100% of target; Max: 120% of target	Target: $852.0M; Actual: $815.9M	89% payout
Non-GAAP Operating Income	50%	Threshold: 70% of target; Target: 100% of target; Max: 130% of target	Target: $236.6M; Actual: $195.4M	71% payout
Personal Performance Score	Included in bonus potential	Not applicable	Score: 83.30%	Contributed to overall cash incentive

Long-Term Equity Incentive Plan (LTIP) (2023)

Performance Stock Units (PSUs)

Performance Metric: Total Shareholder Return (TSR) relative to the Philadelphia Semiconductor Index (SOX)
Performance Periods:
- First Period: 2023 through 2025 (2 years)
- Second Period: 2023 through 2026 (3 years)
Earning Thresholds:
- Below 25th Percentile: 0% of target PSUs earned
- 25th Percentile: 50% of target PSUs earned
- 55th Percentile: 100% of target PSUs earned
- 80th Percentile and above: 200% of target PSUs earned
Negative TSR Cap: Earned PSUs are capped at the target level if the company's TSR is negative
Grant Details:
- Grant Date: February 14, 2023
- Grant Date Fair Value: $2,383,579 for PSUs
- Grant Date Stock Price: Not disclosed

Service-Based Restricted Stock Units (RSUs)

Vesting Schedule: 33.3% vest on each of the first three anniversaries of the grant date
Grant Date Fair Value: $1,943,557 for RSUs
Total Equity Grant Fair Value: $4,327,136

This detailed breakdown covers all available performance compensation components for 2023 using information on performance metrics, targets, payout conditions, and vesting details.