Sign in

You're signed outSign in or to get full access.

Mary Puma

Director at ENTEGRISENTEGRIS
Board

About Mary Puma

Independent director at Entegris (ENTG); age 67; joined the Board in September 2024. Former President & CEO of Axcelis Technologies with >20 years as a public-company CEO; currently serves on multiple technology and semiconductor boards and chairs SEMI. Education: Tufts University (B.A.) and MIT Sloan School of Management (M.S.). Board tenure at ENTG since 2024 with Audit & Finance Committee membership; Board determined she is independent under Nasdaq rules .

Past Roles

OrganizationRoleTenureCommittees/Impact
Axcelis Technologies, Inc.President & Chief Operating OfficerMay 2000–Jan 2002Led operations prior to CEO appointment .
Axcelis Technologies, Inc.President & Chief Executive OfficerJan 2002–May 2023>20 years CEO; strategic and operational leadership of semiconductor equipment supplier .
Eaton CorporationManagement roles1996–2000Technology/manufacturing management experience .
General Electric CompanyMarketing & general management positions~15 years prior to 1996Global commercial and general management foundations .
SEMI (industry association)Chairperson of the BoardSince Dec 2022Industry stewardship; insights across global electronics supply chain .

External Roles

OrganizationRoleStartNotes
Penguin Solutions, Inc.DirectorJul 2023Technology/solutions; public board per ENTG proxy .
Ciena CorporationDirectorAug 2023Network technology; public board .
Allegro Microsystems, Inc.DirectorOct 2023Semiconductor; public board .
SEMIChairpersonDec 2022Global industry association chair .

Independence and interlocks: ENTG’s Board has determined Puma is independent; no Item 404 related-party transactions disclosed upon appointment; ENTG policy prohibits transactions ≥$60,000 with directors/related persons, and none occurred since Jan 1, 2024 .

Board Governance

ItemDetail
Committee assignmentsAudit & Finance Committee member (AFC) .
Committee qualificationsAll AFC members, including Puma, designated “audit committee financial experts” under SEC rules .
Independence statusBoard determined Puma is independent under Nasdaq rules .
2024 meetingsBoard: 6; AFC: 5; MDCC: 5; GNC: 2; EHSSC: 2 .
AttendanceEach director attended at least 75% of Board and applicable committee meetings for the period served in 2024 .
Executive sessionsHeld at each regularly scheduled Board meeting; Lead Independent Director role in place to enhance independent oversight .

Fixed Compensation (Director)

ComponentAmountNotes
Annual cash retainer (non‑employee directors)$105,000Paid quarterly in advance, June–May service period .
Chair fees (if applicable)AFC Chair $20,000; MDCC Chair $15,000; GNC Chair $10,000; EHSSC Chair $10,000; Lead Independent Director $35,000Puma is not a chair; no additional chair fees .
Puma 2024 cash fees$51,346Prorated upon Sept 2024 appointment .

Performance Compensation (Director)

TypeGrant detailVesting/Restrictions2024 Amount
RSUs (annual director grant)$210,000 RSUs, valued at Annual Meeting dateRestrictions lapse on earlier of next Annual Meeting or first anniversary; annual program for all non-employee directors .
RSUs (Puma appointment grant)1,207 RSUs granted Sept 5, 2024Restrictions lapse at earlier of 2025 Annual Meeting or one-year anniversaryGrant-date value $132,975; outstanding unvested RSUs: 1,207 .

No stock options or PSU-based performance awards are granted to non-employee directors; director equity is time-based RSUs aligned to service terms .

Other Directorships & Interlocks

CompanySector Overlap with ENTGPotential Considerations
Allegro Microsystems, Inc.SemiconductorIndustry knowledge and network benefits; ENTG policy and AFC oversight mitigate related-party risks; no related-party transactions disclosed .
Ciena CorporationCommunications techBoard governance and technology operations experience; independence affirmed .
Penguin Solutions, Inc.TechnologyAdditional board workload noted; attendance standards and executive sessions help ensure effectiveness .
SEMI (Chair)Industry associationStrategic industry insights; enhances board’s view of supply chain dynamics .

Expertise & Qualifications

  • Public-company CEO experience in semiconductor equipment; strategic and operational leadership at Axcelis .
  • Governance, business planning, and international market proficiency; insight into supplier roles in the semiconductor ecosystem .
  • Education: Tufts University (B.A.) and MIT Sloan (M.S.) .
  • AFC “financial expert” designation (committee-wide) underscores finance and disclosure competency .

Equity Ownership

MetricAmount/Status
Total beneficial ownership (as of Mar 7, 2025)1,207 shares; under 1% of class .
Vested vs. unvestedOutstanding unvested RSUs: 1,207 (appointment grant) .
OptionsNone disclosed for directors .
Shares pledged/hedgedProhibited for directors under Insider Trading Policy (hedging, pledging, short sales) .
Stock ownership guidelines (directors)5x annual cash retainer; compliance measured annually; all directors compliant or within 5-year grace window as of Jan 15, 2025 (Puma within grace due to 2024 appointment) .

Insider Transactions

DateTypeSecurityQuantityNotes
Sept 5, 2024Equity awardRSUs1,207Appointment grant; restrictions lapse at earlier of 2025 Annual Meeting or one-year anniversary; no Item 404 related-party transactions reported .

The proxy and appointment 8‑K do not list additional Form 4 trades for Puma; monitor SEC Forms 3/4/5 for updates .

Governance Assessment

  • Strengths: Deep semiconductor CEO background; AFC membership with “financial expert” designation; independent status; strong Board governance (majority voting, proxy access, executive sessions, stringent anti-hedging/pledging) .
  • Alignment: Time-based RSUs and director ownership guidelines (5x retainer) promote alignment; Puma holds appointment RSUs and is within guideline grace period .
  • Engagement/Effectiveness: Board and AFC met regularly in 2024; all directors met ≥75% attendance; Lead Independent Director structure supports independent oversight .
  • Conflicts/Red Flags: No related-party transactions; hedging/pledging prohibited; no meeting-attendance red flags disclosed; multiple outside boards suggest high engagement load but protections include attendance standards and committee processes .

Summary: Puma brings high-relevance semiconductor leadership and finance/governance expertise to ENTG’s AFC. Compensation and ownership structures are conventional and alignment-focused; independence and related-party safeguards are robust, supporting investor confidence in Board effectiveness .